Infinitesima
Abingdon, GB · Founded 2001 · 112 employees on LinkedIn · 2 known investors
Infinitesima develops atomic precision 3D metrology technology for the semiconductor industry, including the Rapid Probe Microscope (RPM) that uses thermal-optical actuation and an interferometric measurement system to achieve picometer-precision surface measurement faster than conventional atomic force microscopes. Based near Oxford, UK, it serves semiconductor manufacturers worldwide.
Founders & leadership
Infinitesima was founded in 2001 by Andrew Humphris.

Investors · 2
Funding
SEC filings, press & company announcements- Undisclosed amountSeries BFeb 2026
Maverick Silicon (lead)
Source ↗
Source: company announcements and press reports — follow each round's link for the claim.
Companies House · registry record
View on Companies House ↗- Registered name
- INFINITESIMA LIMITED
- Company number
- 04258410
- Status
- Active
- Company type
- Private limited company
- Incorporated
- 25 Jul 2001
- Registered office
- 1 Hitching Court, Blacklands Way, Abingdon, OX14 1RG
- Nature of business (SIC)
- 26511 — Manufacture of electronic measuring, testing etc. equipment, not for industrial process control
- Accounts
- last made up to 30 Sept 2024 · next due 30 Sept 2026
- Confirmation statement
- last made up to 15 May 2026 · next due 29 May 2027
Current officers · 4
- Andrew James Dixon — director, appointed 24 Jan 2013
- Oreste Donzella — director, appointed 1 Nov 2025
- Andrew David Laver Humphris — director, appointed 8 Aug 2001
- Peter Jenkins — director, appointed 18 Sept 2019
Source: Companies House public register · retrieved 23 Aug 2026. Contains public sector information licensed under the Open Government Licence v3.0.
In the news
Frequently asked questions
- What does Infinitesima do?
- Infinitesima develops atomic precision 3D metrology technology for the semiconductor industry, including the Rapid Probe Microscope (RPM) that uses thermal-optical actuation and an interferometric measurement system to achieve picometer-precision surface measurement faster than conventional atomic force microscopes. Based near Oxford, UK, it serves semiconductor manufacturers worldwide.
- Who founded Infinitesima?
- Infinitesima was founded by Andrew Humphris in 2001.
- Who are Infinitesima's investors?
- Infinitesima's investors include Sussex Place Ventures, Maverick Silicon.
- Where is Infinitesima headquartered?
- Infinitesima is headquartered in Abingdon, GB.
