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Infinitesima

Abingdon, GB · Founded 2001 · 112 employees on LinkedIn · 5 known investors

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Infinitesima develops atomic precision 3D metrology technology for the semiconductor industry, including the Rapid Probe Microscope (RPM) that uses thermal-optical actuation and an interferometric measurement system to achieve picometer-precision surface measurement faster than conventional atomic force microscopes. Based near Oxford, UK, it serves semiconductor manufacturers worldwide.

Founders & leadership

Infinitesima was founded in 2001 by Andrew Humphris.

AHAndrew Humphris
Andrew HumphrisCTO & FounderAndrew Humphris has spent over 25 years developing measurement and process-control technologies for semiconductor manufacturers. He is Founder and CTO of Infinitesima, a company developing atomic-precision 3D metrology systems for semiconductor fabrication, and holds a Visiting Professor position at the University of Bristol.

Investors · 5

Funding

SEC filings, press & company announcements

Source: company announcements and press reports — follow each round's link for the claim.

Companies House · registry record

View on Companies House ↗
Registered name
INFINITESIMA LIMITED
Company number
04258410
Status
Active
Company type
Private limited company
Incorporated
25 Jul 2001
Registered office
1 Hitching Court, Blacklands Way, Abingdon, OX14 1RG
Nature of business (SIC)
26511 — Manufacture of electronic measuring, testing etc. equipment, not for industrial process control
Accounts
last made up to 30 Sept 2024 · next due 30 Sept 2026
Confirmation statement
last made up to 15 May 2026 · next due 29 May 2027

Current officers · 4

  • Andrew James Dixon — director, appointed 24 Jan 2013
  • Oreste Donzella — director, appointed 1 Nov 2025
  • Andrew David Laver Humphris — director, appointed 8 Aug 2001
  • Peter Jenkins — director, appointed 18 Sept 2019

Source: Companies House public register · retrieved 23 Aug 2026. Contains public sector information licensed under the Open Government Licence v3.0.

Frequently asked questions

What does Infinitesima do?
Infinitesima develops atomic precision 3D metrology technology for the semiconductor industry, including the Rapid Probe Microscope (RPM) that uses thermal-optical actuation and an interferometric measurement system to achieve picometer-precision surface measurement faster than conventional atomic force microscopes. Based near Oxford, UK, it serves semiconductor manufacturers worldwide.
Who founded Infinitesima?
Infinitesima was founded by Andrew Humphris in 2001.
Who are Infinitesima's investors?
Infinitesima's investors include Premier Partners, Sussex Place Ventures, Applied Ventures, Future, Maverick Silicon.
Where is Infinitesima headquartered?
Infinitesima is headquartered in Abingdon, GB.