ESOL Venture Capital
3 known investors
E-SOL develops laser-based EUV sources and metrology systems for extreme ultraviolet lithography.
Also known as E-SOL · E-SOL, Inc. · ESOL
Investors · 3
Company profile
researched Aug 2026E-SOL, Inc. (ESOL) develops laser-based source and metrology solutions for extreme ultraviolet (EUV) lithography. The company states expertise in lasers, optics, system engineering and High Harmonic Generation (HHG) EUV sources, positioning its technology to support chipmakers using EUV lithography.
Its product line covers several EUV measurement and lithography applications: FREM (Flex-Ray EUV Microscopy), Ephase (EUV Phase Measurement System), EPTR (EUV pellicle transmission and reflectance measurement system) and EMiLE (EUV Micro-interference Lithography Equipment). The company website also lists FST and AUROS as family sites.
Founding story
E-SOL, Inc. was founded in December 2017 to pioneer laser-based and metrology solutions designed for EUV lithography.
▸Full profile — market position, technology, go-to-market, history
Market position
The company describes itself as a provider of solutions for EUV lithography applications, with the stated ambition of becoming a leading global supplier of EUV solutions.
Technology
The company's technology base spans lasers, optics, system engineering and High Harmonic Generation (HHG) EUV sources, applied to EUV microscopy, phase measurement, pellicle transmission and reflectance measurement, and micro-interference lithography equipment.
Go-to-market
Semiconductor manufacturers (chipmakers) adopting EUV lithography, including users of EUV masks and pellicles.
History
Founded in December 2017, the company built out a portfolio of EUV source and metrology products and presented research on EUV source development for actinic EUV mask tools at the International Conference on Extreme Ultraviolet Lithography in October 2023.
Compiled by commissioned research from 1 cited public sources — announcements, filings, and press listed under research sources below.
Timeline · 1
launches, deals, and filingsE-SOL CTO Lee Dong-geun was scheduled to give a 15-minute presentation, 'Development of various EUV sources for application in actinic tools for EUV masks,' at the International Conference on Extreme Ultraviolet Lithography 2023 (1-5 October 2023).
Dated company events from announcements, filings, and press; legal rows summarize public dockets and regulator releases.
▸Research sources · 1
primary sources listed
- ESOL Venture Capitaleuvsol.com · web
1 public sources were cited for this profile; the first-party ones are listed here.
Frequently asked questions
- What does ESOL Venture Capital do?
- E-SOL develops laser-based EUV sources and metrology systems for extreme ultraviolet lithography.
- Who are ESOL Venture Capital's investors?
- ESOL Venture Capital's investors include IMM Investment Japan, Kiwoom Investment, We Ventures.